Performance of multilayer coatings in relationship to microstructure of metal layers. Characterization and optical properties of Mo/Si multilayers in extreme ultra-violet and X-ray ranges

E. Meltchakov (1) , Vladimir Vidal (2) , H. Faik , Marie-José Casanove , B. Vidal

1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
2 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Here we present a development of multilayer-based optics for the extreme ultraviolet (EUV) and x-ray range. The authors discuss results of the study of optical performance of Mo/Si coatings with regard to the microstructure of metal layers, which was analysed by x-ray diffraction (XRD) and by transmission electron microscopy (TEM). We have demonstrated an ability to control the microstructure of the multilayers via optimization of the deposition process, which is important for various EUV and x-ray applications of multilayer optics.

Domaines: Science des matériaux [cond-mat.mtrl-sci]

E. Meltchakov, Vladimir Vidal, H. Faik, Marie-José Casanove, B. Vidal. Performance of multilayer coatings in relationship to microstructure of metal layers. Characterization and optical properties of Mo/Si multilayers in extreme ultra-violet and X-ray ranges. Journal of Physics: Condensed Matter, 2006, 18 (13), pp.3355-3365. ⟨10.1088/0953-8984/18/13/003⟩. ⟨hal-01529272⟩