Skip to Main content Skip to Navigation
Conference papers

Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal cross section

Complete list of metadatas

https://hal.archives-ouvertes.fr/hal-01522189
Contributor : Dimitri Galayko <>
Submitted on : Saturday, May 13, 2017 - 11:39:34 AM
Last modification on : Tuesday, June 2, 2020 - 7:36:03 AM

Identifiers

Citation

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Francesco Cottone, Frédéric Marty, et al.. Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal cross section. Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, Jan 2013, Taipei, Taiwan. ⟨10.1109/MEMSYS.2013.6474368⟩. ⟨hal-01522189⟩

Share

Metrics

Record views

221