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Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal cross section

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https://hal.archives-ouvertes.fr/hal-01522189
Contributor : Dimitri Galayko <>
Submitted on : Saturday, May 13, 2017 - 11:39:34 AM
Last modification on : Friday, January 8, 2021 - 5:32:07 PM

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Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Francesco Cottone, Frédéric Marty, et al.. Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal cross section. Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, Jan 2013, Taipei, Taiwan. ⟨10.1109/MEMSYS.2013.6474368⟩. ⟨hal-01522189⟩

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