Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal cross section

Raphaël Guillemet (1) , Philippe Basset (1) , Dimitri Galayko (2) , Francesco Cottone (3) , Frédéric Marty (1) , Tarik Bourouina (1)

1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
2 CIAN - Circuits Intégrés Numériques et Analogiques
3 UNIPG - Università degli Studi di Perugia = University of Perugia

Domaines: Energie électrique; Electronique; Electromagnétisme

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Francesco Cottone, Frédéric Marty, et al.. Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal cross section. Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, Jan 2013, Taipei, Taiwan. ⟨10.1109/MEMSYS.2013.6474368⟩. ⟨hal-01522189⟩