Electrostatic generator with free micro-ball and elastic stoppers for low-frequency vibration harvesting

Abstract : We present a new MEMS electrostatic vibration harvester that exploits mechanical frequency amplification by multiple-mass impacts in combination with elastic stoppers. When the system is shaken at low frequency (10-60 Hz) a tungsten micro-ball impacts within the oscillating proof mass of the harvester transferring kinetic energy to the gap-closing comb transducer which in turns resonates at its natural frequency (92 Hz). In addition, elastic stoppers amplify the proof mass and ball velocity throughout collision with the fixed frame. Output power between 0.25 and 0.45 μW is achieved at 0.3-g amplitude and only 15 V bias in the range of 10-60 Hz with a -3db bandwidth of 50 Hz.
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https://hal.archives-ouvertes.fr/hal-01522178
Contributor : Dimitri Galayko <>
Submitted on : Saturday, May 13, 2017 - 11:10:35 AM
Last modification on : Thursday, March 21, 2019 - 2:34:12 PM

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Francesco Cottone, Philippe Basset, Frédéric Marty, Dimitri Galayko, Luca Gammaitoni, et al.. Electrostatic generator with free micro-ball and elastic stoppers for low-frequency vibration harvesting. Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on, Jan 2014, San Francisco, CA, United States. ⟨10.1109/MEMSYS.2014.6765657⟩. ⟨hal-01522178⟩

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