Low-frequency and ultra-wideband MEMS electrostatic vibration energy harvester powering an autonomous wireless temperature sensor node

Abstract : We report a 1-cm2 ultra-wideband MEMS electrostatic vibration energy harvester (e-VEH) that combines a frequency-up conversion system with a vertical electret layer obtained by corona discharge. At 2.0 grms, the device can harvest more than 1 μW from 59 to 148 Hz, and more than 0.5 μW from 14 to 152 Hz. Thanks to this new device, we demonstrate the self-starting power supply of an energy autonomous temperature sensor node with a data transmission beyond a distance of 10 m at 868 MHz.
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https://hal.archives-ouvertes.fr/hal-01521768
Contributor : Dimitri Galayko <>
Submitted on : Friday, May 12, 2017 - 11:44:28 AM
Last modification on : Wednesday, May 15, 2019 - 3:41:56 AM

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Yingxian Lu, Francesco Cottone, Sébastien Boisseau, Frédéric Marty, Dimitri Galayko, et al.. Low-frequency and ultra-wideband MEMS electrostatic vibration energy harvester powering an autonomous wireless temperature sensor node. Micro Electro Mechanical Systems (MEMS), 2016 IEEE 29th International Conference on, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421550⟩. ⟨hal-01521768⟩

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