Low-frequency and ultra-wideband MEMS electrostatic vibration energy harvester powering an autonomous wireless temperature sensor node

Yingxian Lu (1) , Francesco Cottone (2) , Sébastien Boisseau (3) , Frédéric Marty (4) , Dimitri Galayko (5) , Philippe Basset (1)

1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
2 UNIPG - Università degli Studi di Perugia = University of Perugia
3 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
4 GREDEG - Groupe de Recherche en Droit, Economie et Gestion
5 CIAN - Circuits Intégrés Numériques et Analogiques

We report a 1-cm2 ultra-wideband MEMS electrostatic vibration energy harvester (e-VEH) that combines a frequency-up conversion system with a vertical electret layer obtained by corona discharge. At 2.0 grms, the device can harvest more than 1 μW from 59 to 148 Hz, and more than 0.5 μW from 14 to 152 Hz. Thanks to this new device, we demonstrate the self-starting power supply of an energy autonomous temperature sensor node with a data transmission beyond a distance of 10 m at 868 MHz.

Domaines: Energie électrique; Electronique; Electromagnétisme

Yingxian Lu, Francesco Cottone, Sébastien Boisseau, Frédéric Marty, Dimitri Galayko, et al.. Low-frequency and ultra-wideband MEMS electrostatic vibration energy harvester powering an autonomous wireless temperature sensor node. Micro Electro Mechanical Systems (MEMS), 2016 IEEE 29th International Conference on, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421550⟩. ⟨hal-01521768⟩