Electrostatic vibration energy harvester with combined effect of electrical nonlinearities and mechanical impact

Abstract : This paper presents an advanced study including the design, characterization and theoretical analysis of a capacitive vibration energy harvester. Although based on a resonant electromechanical device, it is intended for operation in a wide frequency band due to the combination of stop-end effects and a strong biasing electrical field. The electrostatic transducer has an interdigited comb geometry with in-plane motion, and is obtained through a simple batch process using two masks. A continuous conditioning circuit is used for the characterization of the transducer. A nonlinear model of the coupled system 'transduce-conditioning circuit' is presented and analyzed employing two different semi-analytical techniques together with precise numerical modelling. Experimental results are in good agreement with results obtained from numerical modelling. With the 1 g amplitude of harmonic external acceleration at atmospheric pressure, the system transducer-conditioning circuit has a half-power bandwidth of more than 30% and converts more than 2 µW of the power of input mechanical vibrations over the range of 140 and 160 Hz. The harvester has also been characterized under stochastic noise-like input vibrations.
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https://hal.archives-ouvertes.fr/hal-01521581
Contributeur : Dimitri Galayko <>
Soumis le : vendredi 12 mai 2017 - 01:40:20
Dernière modification le : jeudi 13 septembre 2018 - 15:24:07

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Philippe Basset, Dimitri Galayko, Francesco Cottone, Raphaël Guillemet, Elena Blokhina, et al.. Electrostatic vibration energy harvester with combined effect of electrical nonlinearities and mechanical impact. Journal of Micromechanics and Microengineering, IOP Publishing, 2014, 24, pp.035001. 〈http://iopscience.iop.org/article/10.1088/0960-1317/24/3/035001/meta〉. 〈10.1088/0960-1317/24/3/035001〉. 〈hal-01521581〉

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