Model-Based Eddy Current Determination of the Electrical Conductivity of Semiconductors

Yann Le Bihan (1) , Florent Loete (1) , Josué Ferreira (1) , Denis Mencaraglia (1)

1 GeePs - Laboratoire Génie électrique et électronique de Paris

The purpose of this paper is the development of a procedure for the determination of the electrical conductivity of semiconductor wafers using the eddy current technique. The conductivity estimation is based on an analytical model and done according to two approaches: direct and iterative inversion.

Mots clés: model-based eddy current determination; electrical conductivity; semiconductor wafers; eddy current technique; conductivity estimation; direct inversion; iterative inversion

Domaines: Sciences de l'ingénieur [physics]

Yann Le Bihan, Florent Loete, Josué Ferreira, Denis Mencaraglia. Model-Based Eddy Current Determination of the Electrical Conductivity of Semiconductors. 2016 IEEE Conference on Electromagnetic Field Computation (CEFC), Nov 2016, Miami, United States. ⟨10.1109/cefc.2016.7816375⟩. ⟨hal-01460536⟩