Characterization of the capacitance variation of electrostatic vibration energy harvesters biased following rectangular charge-voltage diagrams

Armine Karami (1) , Dimitri Galayko (1) , Philippe Basset (2)

1 CIAN - Circuits Intégrés Numériques et Analogiques
2 ESYCOM - Electronique, Systèmes de communication et Microsystèmes

This paper presents for the first time a method to measure the capacitance variation of electrostatic vibration energy harvesters (e-VEHs) that employ conditioning circuits implementing a biasing scheme that can be represented by a rectangular charge-voltage diagram. Given the increasing number of e-VEHs using such complex conditioning circuits and the complex dynamics that are induced from this type of biasing, a mean to assess this measurement is of primary importance for the analysis of e-VEHs. The proposed method is based on the inspection of the voltage evolution across two simple conditioning circuits implementing a rectangular charge-voltage diagrams biasing scheme. After the method is presented, it is carried out for the characterization of a state-of-the-art MEMS e-VEH.

Domaines: Micro et nanotechnologies/Microélectronique; Electronique; Sciences de l'ingénieur [physics]; Energie électrique

Armine Karami, Dimitri Galayko, Philippe Basset. Characterization of the capacitance variation of electrostatic vibration energy harvesters biased following rectangular charge-voltage diagrams. Journal of Physics: Conference Series, 2016, 773, pp.12015. ⟨10.1088/1742-6596/773/1/012015⟩. ⟨hal-01445368⟩