Investigation of capacitance-voltage characteristics in Ge/high-kappa MOS devices

Mathieu Moreau (1) , Daniela Munteanu (1) , Jean-Luc Autran , F. Bellenger , J. Mitard , M. Houssa

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

We developed a one-dimensional numerical simulation code for the calculation of the gate voltage-capacitance characteristic of MOS structures including the self-consistently solving of the Schrodinger and Poisson equations for different alternative channel materials with high mobility such as Ge, and non-conventional gate dielectrics such as HfO(2) and Al(2)O(3). Our simulation results are confronted to experimental data for various MOS structures with different semiconductors and dielectric stacks. (C) 2009 Elsevier B.V. All rights reserved.

Domaines: Micro et nanotechnologies/Microélectronique

Mathieu Moreau, Daniela Munteanu, Jean-Luc Autran, F. Bellenger, J. Mitard, et al.. Investigation of capacitance-voltage characteristics in Ge/high-kappa MOS devices. Journal of Non-Crystalline Solids, 2009, 355 (18-21), pp.1171-1175. ⟨10.1016/j.jnoncrysol.2009.01.056⟩. ⟨hal-01430114⟩