Formation of femtosecond laser induced surface structures on silicon: Insights from numerical modeling and single pulse experiments

T. J. -Y. Derrien , R. Torres (1) , T. Sarnet , M. Sentis (1) , T. E. Itina

1 LP3 - Laboratoire Lasers, Plasmas et Procédés photoniques

Laser induced periodic surface structures (LIPSS) are formed by multiple irradiation of femtosecond laser on a silicon target. In this paper, we focus and discuss the surface plasmon polariton mechanism by an analysis of transient phase-matching conditions in Si on the basis of a single pulse experiment and numerical simulations. Two regimes of ripple formation mechanisms at low number of shots are identified and detailed. Correlation of numerical and experimental results is good. (c) 2011 Elsevier B.V. All rights reserved.

Domaines: Optique / photonique

T. J. -Y. Derrien, R. Torres, T. Sarnet, M. Sentis, T. E. Itina. Formation of femtosecond laser induced surface structures on silicon: Insights from numerical modeling and single pulse experiments. Applied Surface Science, 2012, 258 (23), pp.9487-9490. ⟨10.1016/j.apsusc.2011.10.084⟩. ⟨hal-01418610⟩