Broadening of the transmission range of dielectric/metal multilayer structures by using different metals
Résumé
ZnS/M12/ZnS structures, with M12 ¼ Ag, Cu or Cu/Ag, were deposited under vacuum by simple joule heating effect (sublimation or evaporation). The optimum thicknesses of the different layers were experimentally determined: 50/45 nm for ZnS, 11 nm for Ag, 16 nm for Cu and 3 nm/9 nm for Cu/Ag. The presence of the double metal Cu/Ag interlayer induces a significant broadening of the optical transmittance spectrum of these structures. The properties of the structures depend strongly on deposition rate of the different films. When the deposition rates of ZnS, Cu are 0.15 nm/s and 0.30 nm/s for Ag, the averaged transmission, between 400 nm and 1000 nm is 85% while the sheet resistance is 5.0 ± 0.2 Ω/sq. These performances allow achieving an averaged factor of merit ΦM, between 400 nm and 700 nm, of 70 x 10-3 Ω-1. This averaged value tends toward those usually achieved by transparent conductive oxides.