Infra-Red Thermography for spatially resolved measurements of the temperature distribution on the Acoustic Wave devices
Résumé
The continuous miniaturization of surface acoustic wave (SAW) devices linked with operating frequency increase leads to localized heating which can affect the lifetime and the efficiency. In the case of Surface Acoustic Wave (SAW) chips, it is moreover difficult to directly visualize the acoustic wave because of its velocity and its relative low amplitude (some nm). In this paper, we present a method based on infrared observation and leading to observe the propagation path of the SAW with a non-destructive and non-contacting protocol. We show that this technique allows to image the heating of the chip with a good resolution leading to improve the design of SAW devices including, resonators and delay line.