Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications.

Alberto Espinosa (1) , Kanty Rabenorosoa (1) , Cédric Clevy (1) , Bilal Komati (1) , Philippe Lutz (1) , X. Zhang, (2) , R. Samuelson (2) , H. Xie (2)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 UF - University of Florida [Gainesville]

MEMS scanners are useful for medical applications as optical coherence tomography, and laser microsurgery. Although widespread design of MEMS scanners have been presented, their behaviour is not well known and thus their motions are not easily and efficiently controlled. This lack induces several difficulties (limited resolution, accuracy, cycle time, etc.) and to tackle this problem, the paper presents the modeling of an ISC electrothermally actuated MEMS mirror and the experimental characterization for the piston motion. Modeling and characterization are important to implement the control. A multiphysic model is proposed and an experimental validation is performed with a good correspondence for a voltage range from 0V to 3.5V with a maximum displacement up to 200_m and with a relative tilting difference of 0.1°. The paper also presents a simple and efficient experimental setup to measure a displacement in dynamic and static mode or a mirror plane tilting in static mode.

Domaines: Automatique / Robotique

Alberto Espinosa, Kanty Rabenorosoa, Cédric Clevy, Bilal Komati, Philippe Lutz, et al.. Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications.. International Journal of Optomechatronics, 2014, 8, pp.179-194. ⟨hal-01324538⟩