Monolithic integration in CVD diamond: Schottky power diodes and integrated temperature sensor

Nicolas Clément, Jean-Paul Rouger (1) , D. Eon (2) , Gaëtan Perez (1) , Pierre-Olivier Jeannin (1) , Pierre Lefranc (1) , Julien Pernot (2, 3) , Etienne Gheeraert (2) , Yvan Avenas (1)

1 G2ELab - Laboratoire de Génie Electrique de Grenoble
2 NEEL - SC2G - Semi-conducteurs à large bande interdite
3 IUF - Institut universitaire de France

Domaines: Energie électrique

Nicolas Clément, Jean-Paul Rouger, D. Eon, Gaëtan Perez, Pierre-Olivier Jeannin, Pierre Lefranc, et al.. Monolithic integration in CVD diamond: Schottky power diodes and integrated temperature sensor. 2016 MRS Spring Meeting and Exhibit - Diamond Power Electronic Devices symposium, Mar 2016, Phoenix, United States. ⟨hal-01306775⟩