Simple fabrication process for organic piezoelectric resonators : application to viscosity measurement

Abstract : Silicon-based Micro Electro Mechanical Systems (MEMS) success is incontestable as they are widely present in new technologies. However, technologies based on organic electronics are emerging because they are more interesting in terms of fabrication costs, with a large panel of functional properties, and are very attractive for flexible devices. In this context, organic piezoelectric resonators based on a simple low-cost fabrication process are presented in this work for viscosity sensing. It shows the potential of organic resonators in liquid media for biological and chemical sensing.
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https://hal.archives-ouvertes.fr/hal-01301323
Contributor : Isabelle Dufour <>
Submitted on : Sunday, August 28, 2016 - 10:02:23 AM
Last modification on : Friday, January 10, 2020 - 9:10:19 PM
Long-term archiving on: Tuesday, November 29, 2016 - 12:25:37 PM

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  • HAL Id : hal-01301323, version 1

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Pierre-Henri Ducrot, Isabelle Dufour, Fabrice Mathieu, Liviu Nicu, Martin Heinisch, et al.. Simple fabrication process for organic piezoelectric resonators : application to viscosity measurement. 13th International Workshop on Nanomechanical Sensing (NMC 2016), Jun 2016, Delft, Netherlands. ⟨hal-01301323⟩

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