Direct energy influx measurement in reactive magnetron sputtering

Pierre-Antoine Cormier (1) , Dolique Vincent (1) , Anne-Lise Thomann (1) , Jacky Mathias (1) , Balharmi A. (2) , Stephanos Konstantinidis (2) , Remi Dussart (1) , Nadjib Semmar (1) , Rony Snyders (2, 3)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 ChIPS - Chimie des Interactions Plasma-Surface (ChIPS)
3 MNRC - Materia Nova Research Center

Domaines: Matériaux

Pierre-Antoine Cormier, Dolique Vincent, Anne-Lise Thomann, Jacky Mathias, Balharmi A., et al.. Direct energy influx measurement in reactive magnetron sputtering. Reactive sputter deposition RSD 2011, Dec 2011, Linköping, Sweden. ⟨hal-01288906⟩