High entropy alloy thin films deposited by magnetron sputtering of powder targets

Braeckman B.R. (1) , Boydens Francis (1) , Hervé Hidalgo (2) , Perrine Dutheil (2) , Maud Jullien (3) , Anne-Lise Thomann (2) , Diederik Depla (1)

1 Research Group DRAFT
2 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
3 IJL - Institut Jean Lamour

Mots clés: Thin films; Magnetron sputter deposition; Powder targets; High entropy alloys

Domaines: Matériaux; Plasmas

Braeckman B.R., Boydens Francis, Hervé Hidalgo, Perrine Dutheil, Maud Jullien, et al.. High entropy alloy thin films deposited by magnetron sputtering of powder targets. Thin Solid Films, 2015, ⟨10.1016/j.tsf.2015.02.070⟩. ⟨hal-01288728⟩