Sharp bends and Mach-Zehnder interferometer based on Ge-rich-SiGe waveguides on SiGe graded buffer

Vladyslav Vakarin (1) , Papichaya Chaisakul (1) , Jacopo Frigerio (2) , Andrea Ballabio (2) , Xavier Le Roux (2) , Jean-René Coudevylle (1) , David Bouville (1) , Diego Perez-Galacho (1) , Laurent Vivien (1) , Giovanni Isella (2) , Delphine Marris-Morini (1)

1 IEF - Institut d'électronique fondamentale
2 POLIMI - Politecnico di Milano [Milan]

The integration of germanium (Ge)-rich active devices in photonic integrated circuits is challenging due to the lattice mismatch between silicon (Si) and Ge. A new Ge-rich silicon-germanium (SiGe) waveguide on graded buffer was investigated as a platform for integrated photonic circuits. At a wavelength of 1550 nm, low loss bends with radii as low as 12 µm and Multimode Interferometer beam splitter based on Ge-rich SiGe waveguide on graded buffer were designed, fabricated and characterized. A Mach Zehnder interferometer exhibiting a contrast of more than 10 dB has been demonstrated.

Domaines: Physique [physics]; Optique / photonique

Vladyslav Vakarin, Papichaya Chaisakul, Jacopo Frigerio, Andrea Ballabio, Xavier Le Roux, et al.. Sharp bends and Mach-Zehnder interferometer based on Ge-rich-SiGe waveguides on SiGe graded buffer. Optics Express, 2015, ⟨10.1364/OE.23.030821⟩. ⟨hal-01246369⟩