Oxide-based thermoelectric micro-generators for ambiant energy harvesting

Cyril Tchiffo-Tameko (1) , Amer Melhem (1) , Abderazek Talbi , Agnès Petit , Eric Millon (1) , Arnaud Stolz (1) , Chantal Boulmer-Leborgne (1) , Nadjib Semmar (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

We aim to fabricate CaCoO-based thermoelectric micro-generator from the material growth to the prototype fabrication process. Pulsed-laser deposition is used to control the stoichiometry of the thermoelectric properties, which are evaluated by a homemade ZT-meter. Interdigit patterning through standard lithography and inkjet printing techniques are used for fabrication.

Domaines: Thermique [physics.class-ph]; Matériaux; Micro et nanotechnologies/Microélectronique

Cyril Tchiffo-Tameko, Amer Melhem, Abderazek Talbi, Agnès Petit, Eric Millon, et al.. Oxide-based thermoelectric micro-generators for ambiant energy harvesting. Journees Nationales sur les Technologies Emergentes en Micronanofabrication, Nov 2015, Ecully, France. ⟨hal-01245762⟩