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Giant electro-mechanical transduction in all-organic MEMS for physical and chemical sensors

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https://hal.archives-ouvertes.fr/hal-01224585
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Submitted on : Wednesday, November 4, 2015 - 8:17:35 PM
Last modification on : Wednesday, November 17, 2021 - 9:48:04 AM

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  • HAL Id : hal-01224585, version 1

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Damien Thuau, Mamatimin Abbas, Guillaume Wantz, Sylvain Chambon, Pascal Tardy, et al.. Giant electro-mechanical transduction in all-organic MEMS for physical and chemical sensors. IEEE MEMS 2016, 2016, Shangai, China. ⟨hal-01224585⟩

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