DC and AC microplasmas on silicon : performances and limitations

Remi Dussart (1) , Valentin Felix (1) , Lawrence J. Overzet (2) , Olivier Aubry (1) , Philippe Lefaucheux (1) , Judith Golda (3) , V. Schulz-von Der Gathen (3)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 The Plasma Applications Laboratory
3 Institute for Applied Plasma Physics

Domaines: Physique des plasmas [physics.plasm-ph]

Remi Dussart, Valentin Felix, Lawrence J. Overzet, Olivier Aubry, Philippe Lefaucheux, et al.. DC and AC microplasmas on silicon : performances and limitations . Asian-European Plasma Surface Engineering, Masaru Hori, Sep 2015, Jeju, South Korea. ⟨hal-01217651⟩