Large area sample holder unit for enhanced near field microscopy applications

Ahmad Sinno (1) , Pascal Ruaux (1) , Luc Chassagne (1) , Suat Topçu (1) , Yasser Alayli (1) , Gilles Lerondel (2) , Pascal Royer (2) , Aurélien Bruyant (2) , Sylvain Blaize (2)

1 LISV - Laboratoire d'Ingénierie des Systèmes de Versailles
2 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique

Near-field microscopy applications sometimes require scanning the sample over the millimetre range. This paper describes a home-made displacement system that can replace the limited range XY scanner of a classical near-field microscope. The system lays on a coarse/fine displacements configuration to attain the millimetre. Nanometre scale repeatability and resolution are met thanks to a control loop based on phase shifting techniques. The system was tested under an Atomic Force Microscope. The setup of the experiments and the results obtained are herein presented.

Mots clés: high resolution displacement system; near-field microscopy sample-holder; Dimensional nanometrology; closed loop control; laser interferometer; long range of travel

Domaines: Sciences de l'ingénieur [physics]; Micro et nanotechnologies/Microélectronique

Ahmad Sinno, Pascal Ruaux, Luc Chassagne, Suat Topçu, Yasser Alayli, et al.. Large area sample holder unit for enhanced near field microscopy applications. ISOT 2007 International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland. pp.67160E-67169E, ⟨10.1117/12.754194⟩. ⟨hal-01212817⟩