Near Atmospheric Pressure Etching of Silicon by Microplasma

Valentin Felix (1) , Vincent Ah-Leung (1) , Judith Golda (2) , Philippe Lefaucheux (1) , Olivier Aubry (1) , Thomas Tillocher (1) , V. Schulz-von Der Gathen (2) , Lawrence J. Overzet (3) , Remi Dussart (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 Institute for Applied Plasma Physics
3 PAL - Plasma Application Laboratory

Domaines: Physique des plasmas [physics.plasm-ph]

Valentin Felix, Vincent Ah-Leung, Judith Golda, Philippe Lefaucheux, Olivier Aubry, et al.. Near Atmospheric Pressure Etching of Silicon by Microplasma. International workshop on microplasmas, May 2015, Newark, France. ⟨hal-01166020⟩