Fast fabrication process of low environmental impact MEMS

Etienne Lemaire (1) , Damien Thuau (1) , Benjamin Caillard (1) , Isabelle Dufour (1)

1 IMS - Laboratoire de l'intégration, du matériau au système

In the context of building a sustainable future by reducing fossil energy consumption with the objective of minimizing detrimental climate change, particular attention was given to minimizing the complexity, energy consumption and environmental impact of microstructures manufacturing. In this work a new fast-fabrication process for microelectromechanical systems is presented. The name of this new fabrication process is KISSES for Keep It Short, Simple and Environmentally Sustainable. Combining classical deposition techniques (with common metals and polymers and with less common materials such as tree resins, paper and glue), release techniques and a computer numerical control cutting machine, a two-dimensional fabrication process has been developed and the first steps of three-dimensional microfabrication have also been initiated. In order to test this new process, various test structures have been fabricated and tested. These include resonant structures with electronic actuation and electronic measurement, having good quality factors for plastic-based devices, and high-resolution masks (~10 µm) which can be used, for example, for screen-printing techniques. Finally, a temperature sensor and a viscosity sensor have been designed, fabricated with the KISSES process and characterized. These devices exhibit, respectively, a limit of detection of 0.112°C and a viscosity estimation error of less than 10% for viscous silicone oils from 5cP to 50cP. These characterizations of the microdevices show that the proposed process provides a simple method that is capable of fabricating devices that function with high performance. The aim of developing a rapid, simple and environmentally sustainable process has therefore been demonstrated.

Domaines: Micro et nanotechnologies/Microélectronique

Etienne Lemaire, Damien Thuau, Benjamin Caillard, Isabelle Dufour. Fast fabrication process of low environmental impact MEMS. Journal of Cleaner Production, 2015, 108, pp.207-216. ⟨10.1016/j.jclepro.2015.05.111⟩. ⟨hal-01159175⟩