Electromagnetically Driven Torsional Resonators for Viscosity and Mass Density Sensing Applications Electromagnetically Driven Torsional Resonators for Viscosity and Mass Density Sensing Applications

M Heinisch (1) , T Voglhuber-Brunnmaier (1) , Erwin Reichel (1) , I Dufour (2) , B Jakoby (1)

1 Institute for Microelectronics and Microsensors
2 IMS - Laboratoire de l'intégration, du matériau au système

In this contribution a conceptual study for torsional oscillators, which are electromagnetically driven and read out, is presented. The aim is to experimentally investigate the basic feasibility of a torsional resonator with application to viscosity and mass density sensing in liquids. Such a device is particularly interesting as cylindrical, torsional resonators for fluid sensing applications are hardly reported but unlike many other devices, yield pure shear wave excitation in the liquid. The design of first conceptual demonstrators for measurements in air as well as in liquids and their benefits and disadvantages are discussed in detail. A closed form as well as a reduced order model and measurement results obtained with first demonstrators are presented.

Mots clés: Torsional; viscosity; mass density; shear wave; cylinder; resonator

Domaines: Micro et nanotechnologies/Microélectronique

M Heinisch, T Voglhuber-Brunnmaier, Erwin Reichel, I Dufour, B Jakoby. Electromagnetically Driven Torsional Resonators for Viscosity and Mass Density Sensing Applications Electromagnetically Driven Torsional Resonators for Viscosity and Mass Density Sensing Applications. Sensors and Actuators A: Physical , 2015, 229, pp.182-191. ⟨10.1016/j.sna.2015.03.033⟩. ⟨hal-01139778⟩