Various Applications of (Ti,Al)N Thin films Grown from a Vapor Phase

E. Blanquet (1) , Florian Mercier (1) , H. Shimoda , S. Lay (1) , M. Pons (1)

1 SIMaP - Science et Ingénierie des Matériaux et Procédés

Domaines: Matériaux

E. Blanquet, Florian Mercier, H. Shimoda, S. Lay, M. Pons. Various Applications of (Ti,Al)N Thin films Grown from a Vapor Phase. 3CG Collaborative Conference on Crystal Growth, 2014, Phuket, Thailand. ⟨hal-01138921⟩