Auger electronic spectroscopy and electrical characterisation of InP(100) surfaces passivated by N2 plasma

Matthieu Petit (1) , Christine Robert-Goumet (1) , Luc Bideux (1) , Bernard Gruzza (1) , Z Benamara (2) , N Bachir Bouiadjra (2) , V Matolin (3)

1 LASMEA - Laboratoire des sciences et matériaux pour l'électronique et d'automatique
2 Laboratoire de Microélectronique Appliquée
3 UK - Univerzita Karlova [Praha, Česká republika] = Charles University [Prague, Czech Republic]

Auger electron spectroscopy (AES) was used to investigate the processes taking place during the initial stages of InP(100) surfaces nitridation. This AES study combined with electrical measurements (intensity-potential) shows that the processes greatly differ depending on the nitridation angles. Results show that with grazing angle for nitrogen flow, the nitridation process is more efficient. Results obtained with AES spectra are coherent with electrical measurements : Hg/InN/InP(100) Schottky diodes present better electrical characteristics in the case of a grazing flow. That means, the adsorption of nitrogen on the surface is more important for this configuration.

Mots clés: AES; Indium phosphide(100); Indium nitride; electrical measurements

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Matthieu Petit, Christine Robert-Goumet, Luc Bideux, Bernard Gruzza, Z Benamara, et al.. Auger electronic spectroscopy and electrical characterisation of InP(100) surfaces passivated by N2 plasma. Applied Surface Science, 2004, 234 (1-4), pp.451-456. ⟨10.1016/j.apsusc.2004.05.029⟩. ⟨hal-01122589⟩