Laser ablation using high repetition rate Cu/HBr laser

C. de Julián Fernández , J. P. Pique (1) , Dominique Givord (2)

1 LIPhy - Laboratoire Interdisciplinaire de Physique [Saint Martin d’Hères]
2 LLN - Laboratoire Louis Néel

he application of a home made Cu/HBr laser for pulsed laser deposition is investigated. This laser operates at 15 KHz repetition rate with 50 ns pulses of two wavelengths (578 and 510 nm) and with a maximum total power of 100 W. The parameters which define the ablation condition and the specific plasma features are determined and compared to those obtained using a Nd:YAG laser. The effects of including a magnetic field oriented perpendicularly to the target plane in the plasma expansion region are examined. With the Cu/HBr laser the frontal deposition rate is 4 times higher than that obtained with the Nd:YAG laser, increasing up to 40 times when the magnetic field is included in the set-up. However, the ablation process has a duration of 30–40 s and decreases drastically at longer times.

Domaines: Optique [physics.optics]; Physique [physics]

C. de Julián Fernández, J. P. Pique, Dominique Givord. Laser ablation using high repetition rate Cu/HBr laser. Thin Solid Films, 2004, 453-454, pp.345-349. ⟨10.1016/j.tsf.2003.11.100⟩. ⟨hal-01118621⟩