Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs

Abstract : We present experimental data on the reliability of SU-8 polymer when used as a core material for the integration of microlenses on vertical-cavity surface-emitting lasers (VCSELs). The respective effects of a hot and humid environment on structural, mechanical and optical properties of this epoxy resist are investigated. High aspect-ratio SU-8 micropillars are found to keep a good surface morphology and a stable optical transmission, as well as a good adherence on the wafer. Thermal cycling is also studied to check material stability under electro-thermal actuation in SU-8 micro-opto-electro-mechanical system (MOEMS). These results are of great importance for the collective integration of low-cost SU-8-based passive or active microlens arrays onto VCSELs wafers for optical interconnects and optical sensing applications.
Document type :
Journal articles
Complete list of metadatas

Cited literature [17 references]  Display  Hide  Download

https://hal.archives-ouvertes.fr/hal-01103136
Contributor : Open Archive Toulouse Archive Ouverte (oatao) <>
Submitted on : Wednesday, January 14, 2015 - 10:25:41 AM
Last modification on : Friday, January 10, 2020 - 9:08:22 PM
Long-term archiving on: Friday, September 11, 2015 - 6:44:01 AM

File

Reig_12280.pdf
Files produced by the author(s)

Identifiers

Citation

Benjamin Reig, Véronique Bardinal, Jean-Baptiste Doucet, Emmanuelle Daran, Thierry Camps, et al.. Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs. Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2014, vol. 53 (n° 8S2), pp.08MC03-1-08MC03-5. ⟨10.7567/JJAP.53.08MC03⟩. ⟨hal-01103136⟩

Share

Metrics

Record views

507

Files downloads

498