Formation and use of palladium(II)–thiol complexes at the surface of PDMS stamps for the fabrication of high resolution and high density metal patterns using soft-lithography techniques

Jérémy Coulm; Didier Léonard; Cédric Desroches; François Bessueille

Formation and use of palladium(II)–thiol complexes at the surface of PDMS stamps for the fabrication of high resolution and high density metal patterns using soft-lithography techniques

Jérémy Coulm ¹ Didier Léonard ¹ Cédric Desroches ² François Bessueille ^{1, *}

* Corresponding author

1 Surfaces

ISA - Institut des Sciences Analytiques

2 LMI - Laboratoire des Multimatériaux et Interfaces

Abstract : Palladium(II)–thiol complexes were synthetized at the surface of patterned PDMS stamps and were transferred onto the surface of numerous substrates using microcontact printing (μCP) and submerged microcontact printing (SμCP). These complexes were used for the fabrication of micro- and nano-scale metal patterns following both top-down and bottom-up processes. For top-down processes, palladium(II)–thiol complexes were used as mask for wet chemical etching. For bottom-up processes, palladium(II)–thiol complexes were transferred onto silanized silicon wafers and plasma-treated polymers. Plasma post-treatments under reducing conditions led to palladium nanoparticles down to 10 nm in diameter. These nanoparticles were then used as catalysts for the electroless deposition of copper or nickel patterns. Patterns of 200 nm wide metal dots (high resolution) with a period of 400 nm (high density) can be obtained.

Document type :

Journal articles

Domain :

Chemical Sciences / Analytical chemistry

Complete list of metadatas

https://hal.archives-ouvertes.fr/hal-01097722
Contributor : Agnès Bussy <>
Submitted on : Sunday, December 21, 2014 - 4:07:10 PM
Last modification on : Tuesday, October 15, 2019 - 8:44:02 AM

Formation and use of palladium(II)–thiol complexes at the surface of PDMS stamps for the fabrication of high resolution and high density metal patterns using soft-lithography techniques

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Formation and use of palladium(II)–thiol complexes at the surface of PDMS stamps for the fabrication of high resolution and high density metal patterns using soft-lithography techniques

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