Circular Emission and Destruction Patterns on a Silicon-Based Microdischarge Array

Judith Golda (1) , Mukesh Kulsreshath (2) , H Boettner (1) , Valentin Felix (2) , Remi Dussart (2) , V Schulz-von Der Gathen (1)

1 Institute for Applied Plasma Physics
2 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

Silicon-based microdischarge arrays are of high interest as they enable nonthermal plasmas at atmospheric pressure. However, due to their small dimensions, they are highly sensitive to instabilities that can lead to the destruction of the confining structures. The damage, in particular of the top dielectric surface of these devices, can be directly correlated with a destructive operation mode. Images present the emission and destruction structures, which both show a circular pattern along the edges of the cavities.

Domaines: Physique des plasmas [physics.plasm-ph]

Judith Golda, Mukesh Kulsreshath, H Boettner, Valentin Felix, Remi Dussart, et al.. Circular Emission and Destruction Patterns on a Silicon-Based Microdischarge Array. IEEE Transactions on Plasma Science, 2014, 42 (10), pp.2646. ⟨10.1109/TPS.2014.2337657⟩. ⟨hal-01082634⟩