Methodology for Integrated Failure-Cause Diagnosis with Bayesian Approach : Application to Semiconductor Manufacturing Equipment

Asma Abu Samah (1) , Muhammad Kashif Shahzad (2) , Éric Zamaï (1) , Stephane Hubac

1 G-SCOP_GCSP - Gestion et Conduite des Systèmes de Production
2 G-SCOP_SIREP - Système d’Information, conception RobustE des Produits

Domaines: Sciences de l'ingénieur [physics]

Asma Abu Samah, Muhammad Kashif Shahzad, Éric Zamaï, Stephane Hubac. Methodology for Integrated Failure-Cause Diagnosis with Bayesian Approach : Application to Semiconductor Manufacturing Equipment. Second European Conference of the Prognostics and Health Management Society 2014, Jul 2014, Nantes, France. ⟨hal-01044952⟩