X-ray quasi-lamellar etched multilayers: analysis by coupled-mode theory

Abstract : An etched multilayer (EM) is a two-dimensional structure obtained by etching a periodic multilayer following the profile of a grating. Generally, a laminar grating shape, that is, with a rectangular shape, is desired. However, we observe that different EMs give different diffraction efficiency curves. We implement the coupled-mode theory to calculate the diffraction pattern of the EM as a function of the shape of the etching profile. Thus, we try to correlate the variability of the experimental reflectivity curves to various shapes of the profiles, rectangular and trapezoidal, and the corresponding simulated reflectivity curves.
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Jean-Michel André, Karine Le Guen, Philippe Jonnard. X-ray quasi-lamellar etched multilayers: analysis by coupled-mode theory. X-Ray Spectrometry, Wiley, 2013, 43, pp.122. ⟨10.1002/xrs.2526⟩. ⟨hal-00945900⟩

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