Impact of electron-beam lithography irregularities across millimeter-scale resonant grating filter performances

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https://hal.archives-ouvertes.fr/hal-00945088
Contributor : Guillaume Maire <>
Submitted on : Tuesday, February 11, 2014 - 4:11:04 PM
Last modification on : Monday, March 4, 2019 - 2:04:24 PM

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Anne Talneau, Fabien Lemarchand, Anne-Laure Fehrembach, Anne Sentenac. Impact of electron-beam lithography irregularities across millimeter-scale resonant grating filter performances. Applied optics, Optical Society of America, 2010, 49, pp.658. ⟨hal-00945088⟩

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