Influence of composition, bonding characteristics and microstructure on the properties of AlNxOy films

Joel Borges (1) , Nicolas Martin (2) , Nuno Barradas (3) , Eduardo Alves (3) , Laurent Riviere (4) , Dominique Eyidi (4) , Marie-France Beaufort (4) , Thierry Girardeau (4) , Fabien Paumier (4) , Carlos Fonseca (5) , Filipe Vaz (1) , Luis Marques (1)

1 DFUM - Departamento de Física [Minho]
2 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
3 Instituto Superior Técnico, Universidade Técnica de Lisboa
4 PPrime [Poitiers] - Institut Pprime [UPR 3346]
5 DEEC - Departamento de Engenharia Electrotécnica e de Computadores [Porto]

Influence of composition, bonding characteristics and microstructure on the properties of AlNxOy films

Domaines: Micro et nanotechnologies/Microélectronique

Joel Borges, Nicolas Martin, Nuno Barradas, Eduardo Alves, Laurent Riviere, et al.. Influence of composition, bonding characteristics and microstructure on the properties of AlNxOy films. Influence of composition, bonding characteristics and microstructure on the properties of AlNxOy films, Jan 2013, France. ⟨hal-00944890⟩