Integrated temperature sensor based on an enhanced pyroelectric photonic crystal

Huihui Lu (1) , Benattou Sadani (1) , Gwenn Ulliac (1) , Clément Guyot (1) , Nadège Courjal (1) , Manuel Collet (1) , Fadi Issam Baida (1) , Maria-Pilar Bernal (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

In this paper, temperature variations are detected thanks to an enhanced nano-optical pyroelectric sensor. Sensing is obtained with the pyroelectric effect of lithium niobate (LN) in which, a suitable air-membrane photonic crystal cavity has been fabricated. The wavelength position of the cavity mode is tuned 11.5 nm for a temperature variation of only 32 °C. These results agree quite well with 3D-FDTD simulations that predict tunability of 12.5 nm for 32 °C. This photonic crystal temperature sensor shows a sensitivity of 0.359 nm/°C for an active length of only ~5.2 μm.

Domaines: Optique / photonique; Optique [physics.optics]

Huihui Lu, Benattou Sadani, Gwenn Ulliac, Clément Guyot, Nadège Courjal, et al.. Integrated temperature sensor based on an enhanced pyroelectric photonic crystal. Optics Express, 2013, 21, pp.16311 - 16318. ⟨10.1364/OE.21.016311⟩. ⟨hal-00940916⟩