Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-block-poly(methylmethacrylate)

Xavier Chevalier 1, 2, * Célia Nicolet 1, 3 Raluca Tiron 2 Ahmed Gharbi 2 Maxime Argoud 2 Jonathan Pradelles 2 Michael Delalande 4 Gilles Cunge 4 Guillaume Fleury 3, 5 Georges Hadziioannou 3, 5 Christophe Navarro 6
* Auteur correspondant
1 Arkema - Groupement de recherches de Lacq
2 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information
3 LCPO - Laboratoire de Chimie des Polymères Organiques
4 LTM - Laboratoire des technologies de la microélectronique
5 TEAM 4 LCPO
6 Arkema - Groupement de recherches de Lacq
Abstract : Poly(styrene)-block-poly(methylmethacrylate) (PS-b-PMMA) block-copolymers (BCP) systems synthesized on an industrial scale and satisfying microelectronic's requirements for metallic contents specifications are studied in terms of integration capabilities for lithographic applications. We demonstrate in particular that this kind of polymer can efficiently achieve periodic features close to 10 nm. These thin films can be transferred in various substrates through dry-etching techniques. The self-assembly optimization for each polymer is first performed on free-surface, leading to interesting properties, and the changes in self-assembly rules for low molecular-weight polymers are investigated and highlighted through different graphoepitaxy approaches. The improvements in self-assembly capabilities toward low periodic polymers, as well as the broad range of achievable feature sizes, make the PS-b-PMMA system very attractive for lithographic CMOS applications. We conclude by showing that high-chi polymer materials developed in Arkema's laboratories can be efficiently used to reduce the pattern's size beyond the ones of PS-b-PMMA based BCP's capabilities. (C) 2013 Society of Photo-Optical Instrumentation Engineers (SPIE)
Keywords : graphoepitaxy lithography block-copolymer self-assembly PS-b-PMMA
Type de document :
Article dans une revue
Journal of Micro-Nanolitography MEMS and MOEMS, 2013, 12 (3), pp.Nb 031102. 〈10.1117/1.JMM.12.3.031102〉
Domaine :
Liste complète des métadonnées
https://hal.archives-ouvertes.fr/hal-00926366
Contributeur : Dominique Richard <>
Soumis le : jeudi 9 janvier 2014 - 14:56:02
Dernière modification le : vendredi 15 mars 2019 - 10:52:03

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Xavier Chevalier, Célia Nicolet, Raluca Tiron, Ahmed Gharbi, Maxime Argoud, et al.. Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-block-poly(methylmethacrylate). Journal of Micro-Nanolitography MEMS and MOEMS, 2013, 12 (3), pp.Nb 031102. 〈10.1117/1.JMM.12.3.031102〉. 〈hal-00926366〉

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