Xavier Chevalier, Célia Nicolet, Raluca Tiron, Ahmed Gharbi, Maxime Argoud, et al.. Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-block-poly(methylmethacrylate).
Journal of Micro-Nanolitography MEMS and MOEMS, 2013, 12 (3), pp.Nb 031102.
⟨10.1117/1.JMM.12.3.031102⟩.
⟨hal-00926366⟩