Fast Image Drift Compensation in Scanning Electron Microscope using Image Registration.

Naresh Marturi (1) , Sounkalo Dembélé (1) , Nadine Piat (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Scanning Electron Microscope (SEM) image acquisition is mostly affected by the time varying motion of pixel positions in the consecutive images, a phenomenon called drift. In order to perform accurate measurements using SEM, it is necessary to compensate this drift in advance. Most of the existing drift compensation methods were developed using the image correlation technique. In this paper, we present an image registration-based drift compensation method, where the correction on the distorted image is performed by computing the homography, using the keypoint correspondences between the images. Four keypoint detection algorithms have been used for this work. The obtained experimental results demonstrate the method's performance and efficiency in comparison with the correlation technique.

Domaines: Micro et nanotechnologies/Microélectronique

Naresh Marturi, Sounkalo Dembélé, Nadine Piat. Fast Image Drift Compensation in Scanning Electron Microscope using Image Registration.. IEEE International Conference on Automation Science and Engineering, CASE'13., Jan 2013, United States. pp.1-6. ⟨hal-00876194⟩