Integrative Technology-Based Approach of Microelectromechanical Systems (MEMS) for Biosensing Applications

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https://hal.archives-ouvertes.fr/hal-00865903
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Submitted on : Wednesday, September 25, 2013 - 12:11:55 PM
Last modification on : Friday, January 10, 2020 - 9:10:13 PM

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  • HAL Id : hal-00865903, version 1

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Liviu Nicu, Thomas Alava, Thierry Leichle, Daisuke Saya, Jean Bernard Pourciel, et al.. Integrative Technology-Based Approach of Microelectromechanical Systems (MEMS) for Biosensing Applications. EMBC'12, 2012, San Diego, United States. 4 p. ⟨hal-00865903⟩

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