Fabrication and characterization of a fully integrated biosensor associating microfluidic device and RF circuit

Stéphane Pinon 1 Daouda Lamine Diedhiou 2 Ali Boukabache 1 Véronique Conédéra 3 David Bourrier 3 Anne-Marie Gué 1 Gaëtan Prigent 4 Eric Rius 2 Cédric Quendo 2 Benjamin Potelon 2 Jean-François Favennec 5
1 LAAS-N2IS - Équipe Nano Ingénierie et Intégration des Systèmes
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
2 Lab-STICC_UBO_MOM_DIM
UBO - Université de Brest, Lab-STICC - Laboratoire des sciences et techniques de l'information, de la communication et de la connaissance
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
5 Lab-STICC_ENIB_MOM_DIM
Lab-STICC - Laboratoire des sciences et techniques de l'information, de la communication et de la connaissance
Abstract : This paper presents the first results of the fabrication and characterization of a biological sensor based on two complementary parts. A microfluidic channel along with a micromachined stop-band filter are used to detect the type of fluid which flows beneath the electronic circuit. The tridimensional (3D) structure of the microstrip technology is integrated using SU8 material which thus supports the use of buried channels. Besides being a method without contact, this bio-sensor avoids evaporation, contamination, or label fixation. Changes to the cutoff frequency and attenuation allow us to differentiate three values of the salt in water concentration with a maximum variation of attenuation of 6.5%.
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https://hal.archives-ouvertes.fr/hal-00856168
Contributor : Jean-François Favennec <>
Submitted on : Friday, August 30, 2013 - 3:33:32 PM
Last modification on : Friday, June 14, 2019 - 6:31:06 PM

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  • HAL Id : hal-00856168, version 1

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Stéphane Pinon, Daouda Lamine Diedhiou, Ali Boukabache, Véronique Conédéra, David Bourrier, et al.. Fabrication and characterization of a fully integrated biosensor associating microfluidic device and RF circuit. IMS 2012 - Microwave Symposium Digest (MTT), 2012 IEEE MTT-S, Jun 2012, Montréal, Canada. pp.THPN-1 1330. ⟨hal-00856168⟩

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