Development of a microsystem based on a microfluidic network to tune and reconfigure RF circuits

Stéphane Pinon 1 Daouda Lamine Diedhiou 2 Anne-Marie Gué 1 Norbert Fabre 3 Gaëtan Prigent 4 Véronique Conédéra 3 Eric Rius 2 Cédric Quendo 2 Benjamin Potelon 2 Jean-François Favennec 5 Ali Boukabache 1
1 LAAS-N2IS - Équipe Nano Ingénierie et Intégration des Systèmes
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
2 Lab-STICC_UBO_MOM_DIM
Lab-STICC - Laboratoire des sciences et techniques de l'information, de la communication et de la connaissance, UBO - Université de Brest
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
5 Lab-STICC_ENIB_MOM_DIM
Lab-STICC - Laboratoire des sciences et techniques de l'information, de la communication et de la connaissance
Abstract : This special issue presents devices and the results of a tunable microwave microsystem associating RF circuits and microfluidic components. A channel is buried inside the substrate of a microstrip waveguide. This channel is located beneath a resonant stub. With this configuration a microfluidic passive tunable filter can be fabricated. Dielectric fluids are used to disrupt the electric field in a microstrip structure and thus modify the effective permittivity of the substrate. In this work, a notch filter is realized with an open-ended quarter-wavelength stub placed on top of a hollow SU-8 structure. This structure offers two advantages: channels can easily be fabricated and a reduction of SU8 losses. The filter shows a good performance; the initial cut-off frequency of 25 GHz shifts more than 20% when deionized water is used in fluidic channels. And the shape of RF function is kept throughout the range.
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https://hal.archives-ouvertes.fr/hal-00855589
Contributor : Jean-François Favennec <>
Submitted on : Thursday, August 29, 2013 - 4:08:56 PM
Last modification on : Friday, June 14, 2019 - 6:31:06 PM

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  • HAL Id : hal-00855589, version 1

Citation

Stéphane Pinon, Daouda Lamine Diedhiou, Anne-Marie Gué, Norbert Fabre, Gaëtan Prigent, et al.. Development of a microsystem based on a microfluidic network to tune and reconfigure RF circuits. Journal of Micromechanics and Microengineering, IOP Publishing, 2012, 22 (7), pp.article id. 074005. ⟨hal-00855589⟩

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