Niobium-based superconducting nano-devices fabrication using all-metal suspended masks

Sayanti Samaddar (1) , David van Zanten (1) , Aurélien Fay (1) , Benjamin Sacépé (1) , Hervé Courtois (1) , Clemens Winkelmann (1)

1 NEEL - QuNES - Nano-Electronique Quantique et Spectroscopie

We report a novel method for the fabrication of superconducting nanodevices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium-gold-niobium proximity SQUIDs.

Domaines: Autre [cond-mat.other]; Physique Générale [physics.gen-ph]

Sayanti Samaddar, David van Zanten, Aurélien Fay, Benjamin Sacépé, Hervé Courtois, et al.. Niobium-based superconducting nano-devices fabrication using all-metal suspended masks. Nanotechnology, 2013, 24 (37), pp.375304. ⟨10.1088/0957-4484/24/37/375304⟩. ⟨hal-00847023⟩