On-wafer multi-port circuits charaterization technique with a two-port VNA

Sébastien Quintanel (1) , Daniel Pasquet (2, 3) , Emmanuelle Bourdel (4) , Cédric Duperrier (1) , Dominique Lesenechal (3) , T. -V. Dinh (2) , P. Descamps (2)

1 ASTRE [Cergy-Pontoise]
2 CRISMAT - Laboratoire de cristallographie et sciences des matériaux
3 LaMIPS - Laboratoire de Microélectronique et de Physique des Semiconducteurs
4 ETIS - UMR 8051 - Equipes Traitement de l'Information et Systèmes

This paper describes a simple technique for on wafer passive multi-port circuits characterization. This method gives an efficient measurement of the scattering S-parameters of these devices at their ports reference planes. Furthermore, it provides cost saving in terms of used wafer surface and equipments by using an universal two-port Vector Network Analyzer (VNA). This method is applied to the characterization of a branch-line coupler designed on a lossy silicon substrate at millimeter waves (30 GHz). The de-embedding and the experimental procedures are presented in this paper. The experimental measurements extracted from our method show a good agreement with those made with a four-port VNA.

Mots clés: Ports (computers); Scattering parameters; Calibration; Couplers; Impedance; Electric variables measurement; Millimetre wave circuits; Millimetre wave couplers; Millimetre wave measurement; Network analysers; Passive networks; S-parameters; Two-port networks; Multi-port circuits; Millimeter waves; Branch-line coupler

Domaines: Electronique

Sébastien Quintanel, Daniel Pasquet, Emmanuelle Bourdel, Cédric Duperrier, Dominique Lesenechal, et al.. On-wafer multi-port circuits charaterization technique with a two-port VNA. 81st ARFTG Microwave Measurement Conference, Jun 2013, Seattle, United States. pp.1-4, ⟨10.1109/ARFTG.2013.6579058⟩. ⟨hal-00832506⟩