Development of microdicharge arrays in silicon operating in DC and AC

Mukesh Kulsreshath (1) , Laurent Schwaederlé (1) , Lawrence J. Overzet (2) , Thomas Tillocher (1) , Sébastien Dozias (1) , Valentin Félix (3) , Philippe Lefaucheux (1) , Olivier Aubry (1) , V. Schulz-von Der Gathen (4) , Remi Dussart (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 PAL - Plasma Application Laboratory
3 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
4 Institute for Applied Plasma Physics

Domaines: Physique des plasmas [physics.plasm-ph]

Mukesh Kulsreshath, Laurent Schwaederlé, Lawrence J. Overzet, Thomas Tillocher, Sébastien Dozias, et al.. Development of microdicharge arrays in silicon operating in DC and AC. European Physical Society/International Conference on Plasma Physics, Jul 2012, Stockholm, Sweden. ⟨hal-00831351⟩