Structure of TiAlN Reactive Sputtered Coatings

V.N. Denisov (1, 2) , B.N. Mavrin (3) , E.A. Vinogradov (3) , S.N. Polyakov (1) , A.N. Kirichenko (1) , A.S. Useinov (1) , V.D. Blank (1) , Vanda Godinho (4, 5) , David Philippon (4, 6) , Asuncion Fernández (4)

1 Technological Institute for Superhard and Novel Carbon Materials
2 Institute for Spectroscopy RAS
3 Institute of Spectroscopy of Russian Academy of Sciences
4 ICMSE - Instituto de Ciencia de Materiales de Sevilla
5 Faculté des Sciences appliquées [Bruxelles]
6 LaMCoS - Laboratoire de Mécanique des Contacts et des Structures [Villeurbanne]

Domaines: Science des matériaux [cond-mat.mtrl-sci]

V.N. Denisov, B.N. Mavrin, E.A. Vinogradov, S.N. Polyakov, A.N. Kirichenko, et al.. Structure of TiAlN Reactive Sputtered Coatings. Journal of Nano and Electronic Physics, 2012, 4 (1), pp.01021. ⟨hal-00825490⟩