Calibration method for high frequency microphones

Sébastien Ollivier , Edouard Salze (1) , Mikhail Averiyanov (2) , Petr Yuldashev (1) , Vera Khokhlova (2) , Philippe Blanc-Benon (1)

1 LMFA - Laboratoire de Mecanique des Fluides et d'Acoustique
2 Department of Acoustics, MSU

In the context of the development of MEMS microphones designed for the measurement of high frequency waves (> 100 kHz) and weak shockwaves in air, it is necessary to define new calibration methods in order to estimate accurately the frequency response of new sensors. For this purpose, we will present the principle of a calibration method based on the measurement of weak shockwaves generated by a spark source. The influence of the sources of error will be discussed. To demonstrate the interest of the method, measured responses of 1/8" microphones will be given for various mountings. This work is supported by French National Agency (ANR 2010 BLAN 0905 03) and by French/Russian International Program for Scientific Cooperation PICS (RFBR 10-02-91062/CNRS 5063)

Mots clés: microphone; calibration; N-waves; high-frequency

Domaines: Acoustique [physics.class-ph]

Sébastien Ollivier, Edouard Salze, Mikhail Averiyanov, Petr Yuldashev, Vera Khokhlova, et al.. Calibration method for high frequency microphones. Acoustics 2012, Apr 2012, Nantes, France. ⟨hal-00811138⟩