Non contact measurement of thin layer thickness by zero group velocity Lamb modes

Abstract : A homogeneous elastic plate can support non-propagating Lamb modes having a zero group velocity (ZGV) for nonzero values of their wave number, giving rise to sharp resonances. For plates covered with a thin layer, it was shown that the frequency of the S1S2 ZGV resonance was shifted proportionally to the mass loading through a factor which depends on the mechanical properties of the layer and of the substrate. As they are non-contact and broadband, Laser Based Ultrasonics techniques are very efficient to investigate mechanical vibrations. In our experiments, Lamb modes were generated by a Nd:YAG pulsed laser. An optical interferometer was used to measure the displacement normal to the plate surface at the same point on the non-coated face. Gold layers of a few hundred nanometers were detected through a 1.5-mm thick Duralumin plate. The shift of the 1.9-MHz resonance frequency of the fundamental ZGV mode is proportional to the layer thickness: typically 10 kHz per μm for a gold layer deposited on a Duralumin plate. Taking into account the influence of the temperature, a 240-nm gold layer was measured with a \pm 4% uncertainty. This thickness has been verified by scanning the coated face with an optical profiling system.
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Submitted on : Monday, April 23, 2012 - 10:00:00 AM
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  • HAL Id : hal-00811086, version 1


Maximin Cès, Dominique Clorennec, Daniel Royer, Claire Prada. Non contact measurement of thin layer thickness by zero group velocity Lamb modes. Acoustics 2012, Apr 2012, Nantes, France. ⟨hal-00811086⟩



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