Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure

Willi Volksen (1) , Sampath Purushothaman (2) , Maxime Darnon (3, 2) , Mike Lofaro (2) , Stephan Cohen (2) , James Doyle (2) , Nicholas Fuller (2) , Teddie Magbitang (1) , Philip Rice , Leslie Krupp , Hisashi Nakagawa , Youhei Nobe , Terukazu Kokubo , Geraud Dubois (1)

1 IBM Almaden Research Center [San Jose]
2 IBM Thomas J. Watson Research Center
3 LTM - Laboratoire des technologies de la microélectronique

Domaines: Sciences de l'ingénieur [physics]; Micro et nanotechnologies/Microélectronique

Willi Volksen, Sampath Purushothaman, Maxime Darnon, Mike Lofaro, Stephan Cohen, et al.. Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure. ECS Journal of Solid State Science and Technology, 2012, 1 (5), pp.N85-N90. ⟨10.1149/2.013205jss⟩. ⟨hal-00808848⟩