Dual mode, multiple electrodes Quartz Sensor.

Ioan Alexandru Ivan (1) , Roger Bourquin (2) , Bernard Dulmet (2)

1 Automation and Information Department - Electrical Engineering Faculty
2 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

We present a method to design the electrodes shape of contoured BAW resonators intended to serve as temperature compensated force sensors. Those are based on simultaneous operation on two families of modes: fast shear B-mode and slow shear C-mode. Use of anharmonic modes instead of main overtone ones provides the possibility of spatial separation of vibrating areas, each mode being driven by separated pairs of electrodes. Electronic circuitry is greatly simplified and force deriving is straightforward.

Mots clés: force sensor; BAW resonator; anharmonic modes; force sensor.

Domaines: Electronique

Ioan Alexandru Ivan, Roger Bourquin, Bernard Dulmet. Dual mode, multiple electrodes Quartz Sensor.. IEEE Ultrasonics Symposium, 2005, 2, pp.1262-1265. ⟨10.1109/ULTSYM.2005.1603081⟩. ⟨hal-00797930⟩