Bias dependence of gallium nitride micro-electro-mechanical systems actuation using a two-dimensional electron gas

A. Ben Amar , M. Faucher (1) , B. Grimbert , Y. Cordier , M. François , P. Tilmant , M. Werquin , V. Zhang , D. Ducatteau , Christophe Gaquière , L. Buchaillot , D. Theron

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520

A. Ben Amar, M. Faucher, B. Grimbert, Y. Cordier, M. François, et al.. Bias dependence of gallium nitride micro-electro-mechanical systems actuation using a two-dimensional electron gas. Japanese Journal of Applied Physics, part 2 : Letters, 2012, 5, pp.067201-1-3. ⟨10.1143/APEX.5.067201⟩. ⟨hal-00787414⟩