Signal Measurement and Estimation Techniques for Micro and Nanotechnology.

Cédric Clévy (1) , Micky Rakotondrabe (1) , Nicolas Chaillet (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Signal Measurement and Estimation Techniques for Micro and Nanotechnology provides a state-of-the-art discussion on techniques and solutions to measure and estimate signals at the micro and nano scale. new technologies and applications such as micromanipulation (artificial components, biological objects), micro-assembly (MEMS, MOEMS, NEMS) and material and surface forces characterization are covered. The importance of sensing at the micro and nano scale is presented as a key issue in control systems, as well as for understanding the physical phenomena of these systems.

Domaines: Micro et nanotechnologies/Microélectronique

Cédric Clévy, Micky Rakotondrabe, Nicolas Chaillet (Dir.). Signal Measurement and Estimation Techniques for Micro and Nanotechnology.. SPRINGER, pp.242, 2011, 978-1-4419-9945-0. ⟨10.1007/978-1-4419-9946-7⟩. ⟨hal-00719981⟩